Principal Configurations | MSA-100-3D Single-Point 3D Vibrometer | MSA-100-3DSV Scanning 3D Vibrometer |
Sensor head unit | Microscope optics for best lateral resolution with spot size<4 μm
Integrated LED sample illumination |
Front-End unit /
Data management system | Installed in a system cabinet for 19" electrical equipment:
MSA-F-100-3D Vibrometer front end with digital decoder technology
MSA-W-100-3D Data Management System |
Stａnd (optional) | Rigid stａnd for interfacing the sensor head unit to an optical table or breadboard,
incl. focus block with 100 mm travel range for traversing the sensor head unit in the Z axis |
Prober compatibility | Compatible to manual, automatic and vacuum probestations |
xy Stage | Manual stage (optional) | A-PST-200P XY Precision Positioning Stage:
Travel range: 200 mm x 200 mm
Tip/tilt adjustment
Bi-directional repeatability: +/- 0.5 µm
Load capacity: 10 kg |
Software | VibSoft-1004 Software Package for data acquisition and analysis | PSV Scanning Vibrometer Software for data acquisition and analysis |
Sensor Head Unit |
Configuration | Single measurement beam, three direction sensitive detectors |
Laser source | DPSS, 532 nm, visible green laser beam |
Laser output power | <5 mW visible output power |
Laser safety class | Class 2M |
Stand-off distance | 36,7 mm |
Spot diameter | <4 µm |
Depth of focus | ±10 µm |
Weight | 12.5 kg |
Camera | Two integrated digital cameras for displaying measurement and large overview area
MAIN (measurement area): field of view (mm²) = 0.94 x 0.71, resolution (px) = 1,296 x 966
AUX (overview area): field of view (mm²) = 3.7 x 2.7, resolution (px) =782 x 582 |
Front-End Configurations | MSA-100-3D-H | MSA-100-3D-M | MSA-100-3D-V |
fmax | 100 kHz | 2.5 MHz | 25 MHz |
Number of ranges | 13 velocity ranges | 13 velocity ranges | 13 velocity ranges |
vmax | 0.01 m/s … 10 m/s, range dependent | 0.001 m/s … 10 m/s, range dependent | 0.001 m/s … 10 m/s, range dependent |
Velocity resolution, average value | 0.01 (µm/s)/√Hz … 0.02 (µm/s)/√Hz range dependent, frequency dependent | 0.005 (µm/s)/√Hz … 1 (µm/s)/√Hz range dependent, frequency dependent | 0.005 (µm/s)/√Hz …. 2 (µm/s)/√Hz range dependent, frequency dependent |
General Specifications |
Power consumption | 100 VAC ... 240 VAC ±10%, 50/60 Hz; overall max. 825 W |
Environmental conditions | Operating temperature: +18 °C ... +28 °C (64.4 °F ... 82.4 °F);
Storage temperature: –10 °C ... +65 °C (14 °F ... 149 °F); Relative humidity: max. 80%, non-condensing |
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